Company Filing History:
Years Active: 1996
Title: A Closer Look at Inventor Leslie A. Honfi
Introduction
Leslie A. Honfi, an accomplished inventor based in Sunnyvale, CA, has made significant contributions to the field of microcircuit fabrication. With a notable patent to her name, she exemplifies the innovative spirit that drives advancements in technology.
Latest Patents
Honfi holds a patent for an "Electron Beam Inspection System and Method." This innovative system comprises a method and apparatus for a charged particle scanning system and an automatic inspection system, particularly for the wafers and masks used in microcircuit fabrication. The technology involves directing a charged particle beam at the surface of a substrate, facilitating detailed inspections through various detectors that identify secondary charged particles, back-scattered charged particles, and transmitted charged particles. The substrate can be positioned with precision using an x-y stage, while an electric field aids in accelerating the detected particles.
Career Highlights
Leslie A. Honfi has made her mark in the electronics and semiconductor industries through her work at Kla Instruments Corporation. Her expertise in charged particle scanning systems has positioned her as a leading figure in the field. The complexity and functionality of her patented technology underline her profound understanding of the challenges faced in microcircuit fabrication.
Collaborations
Throughout her career, Honfi has collaborated with talented professionals, including coworkers such as Dan Meisberger and Alan D. Brodie. These collaborations have not only enriched her work but have also contributed to advancements in the technologies developed at Kla Instruments Corporation.
Conclusion
Leslie A. Honfi stands out as an influential inventor whose work in electron beam inspection technology illustrates the importance of innovation in the semiconductor industry. Her contributions, guided by her experiences and collaborations, pave the way for future advancements and underscore the vital role of inventors in technology development.