Leonid Romm

Title: Celebrating the Innovations of Leonid Romm

Introduction

Leonid Romm is an accomplished inventor based in Pleasanton, California, known for his significant contributions to the semiconductor industry. With two patents to his name, Romm has been instrumental in developing innovative techniques that enhance semiconductor device fabrication.

Latest Patents

Romm's latest patents include methods that advance the technology used in semiconductor processing. One of his notable inventions is a method for forming a semiconductor device in a plasma processing chamber. This technique involves a dielectric contact etch that selectively etches silicon dioxide (SiO) with respect to silicon nitride (SiN) and deposits a fluorinated polymer. A unique aspect of this process is the stripping of the fluorinated polymer layer, which involves flowing a stripping gas containing oxygen into the chamber to form plasma, subsequently etching the SiN layer selectively.

Another important patent addresses the fabrication of semiconductor structures with Low K dielectric properties. Romm's approach to creating a copper dual damascene structure includes the formation of a capping film over a Low K dielectric insulator before defining the features. He employs ultra-gentle chemical mechanical polishing (CMP) to remove the copper overburden and a dry etch process to eliminate the barrier, followed by a second etch to thin the capping film. This innovative thinning process reduces the K-value of the Low K dielectric structure without complete removal of the film.

Career Highlights

Leonid Romm currently works at Lam Research Corporation, a leading company in semiconductor manufacturing systems. His expertise in plasma processing and semiconductor structures has made him a vital asset to the team. Romm's commitment to innovation has paved the way for advancements that benefit the industry as a whole.

Collaborations

Throughout his career, Romm has collaborated with notable colleagues such as Yehiel Gotkis and Rodney C. Kistler. These partnerships have fostered a collaborative environment that drives technological advancement and supports shared objectives in semiconductor research and development.

Conclusion

Leonid Romm's contributions to the field of semiconductors through his patents and innovative methods highlight his role as a key inventor in the industry. His work at Lam Research Corporation and collaborations with fellow professionals underscore the importance of teamwork in driving innovations that ultimately enhance semiconductor technology. Romm's dedication to improving manufacturing processes continues to influence the future of semiconductor device fabrication.