Company Filing History:
Years Active: 2005-2025
Title: Innovations in Semiconductor Processing by Leonard Wai Fung Kho
Introduction
Leonard Wai Fung Kho, based in San Francisco, CA, is a notable inventor in the field of semiconductor technology. He holds an impressive portfolio of 29 patents, showcasing his commitment to advancing innovations that enhance semiconductor processing.
Latest Patents
Among his latest innovations is a patent on the "Ex situ coating of chamber components for semiconductor processing." This invention encompasses the formation of a protective coating ex situ using an atomic layer deposition process for components installed in reaction chambers. The protective coating may include materials such as aluminum oxide, aluminum fluoride, aluminum nitride, yttrium oxide, or yttrium fluoride. It significantly reduces contamination on wafers during processing and stabilizes the conditions within the reaction chamber. This stability leads to uniform processing results across multiple wafer batches while minimizing radical loss. The patent also outlines techniques for restoring the protective coating after use, demonstrating Kho's commitment to enhancing reliability in semiconductor manufacturing.
Career Highlights
Leonard Kho's career features significant contributions while working with reputable companies, including Nikon Corporation and Lam Research Corporation. His experience in these organizations has equipped him with the insights necessary to revolutionize processes within the semiconductor industry.
Collaborations
During his career, Kho has collaborated with distinguished professionals, including Alex Ka Tim Poon and Derek Coon. These partnerships highlight the collaborative nature of innovation within the semiconductor field and the importance of teamwork in advancing technology.
Conclusion
Leonard Wai Fung Kho's contributions to semiconductor processing through his patents exemplify his innovative spirit and dedication to improving industry practices. With a strong focus on protective coatings and contamination reduction, his work represents a significant advancement in semiconductor technology, ensuring better yield and reliability for manufacturers.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.