Lei Ma

Title: Lei Ma - Innovator in Electrostatic Chuck Technology

Introduction

Lei Ma is a prominent inventor based in Kyoto, Japan. He is known for his contributions to the field of electrostatic chuck devices, which are essential in various industrial applications. His innovative work has led to the development of a unique patent that enhances the efficiency of these devices.

Latest Patents

Lei Ma holds a patent for an "Electrostatic chuck device, pressure calculation method and program." This invention involves an electrostatic chuck device designed to adsorb an object using electrostatic force. The device features an adsorption plate with a surface that effectively holds the object. It includes a gas supplying line that delivers a thermally conductive gas to the gap between the adsorption surface and the object's surface. Additionally, a pressure calculation section is integrated to determine the pressure of the thermally conductive gas in the gap. The gas supplying line is equipped with a flow rate resistive element that creates resistance during the gas flow. The pressure calculation section computes the gas pressure based on the primary side pressure of the flow rate resistive element, the flow rate of the thermally conductive gas, and the flow characteristics of the resistive element.

Career Highlights

Lei Ma is currently employed at Horiba Stec, Co., Ltd., where he continues to innovate and develop advanced technologies. His work at the company has significantly contributed to the advancement of electrostatic chuck devices, making them more efficient and reliable for various applications.

Collaborations

Lei Ma has collaborated with notable colleagues, including Andrew Wayne Price and Tadahiro Yasuda. These collaborations have fostered a creative environment that encourages innovation and the sharing of ideas.

Conclusion

In summary, Lei Ma is a distinguished inventor whose work in electrostatic chuck technology has made a significant impact in the field. His patent and ongoing contributions at Horiba Stec, Co., Ltd. highlight his commitment to advancing technology and innovation.