Location History:
- Taipei, TW (1997)
- Hsin-Tien, TW (1999)
Company Filing History:
Years Active: 1997-1999
Title: Innovations of Lee-Wei Yen
Introduction
Lee-Wei Yen is a prominent inventor based in Taipei, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in the development of advanced gate dielectrics and integrated circuit processes. With a total of 2 patents, his work has had a substantial impact on the industry.
Latest Patents
One of Lee-Wei Yen's latest patents is titled "Gate dielectric based on oxynitride grown in N.sub.2 O and annealed in NO." This innovative technique proposes a new method for forming high-quality ultrathin gate dielectrics. The gate oxynitride is initially grown in N.sub.2 O and subsequently annealed through in-situ rapid thermal NO-nitridation. This method offers a tighter nitrogen distribution and a higher nitrogen accumulation at or near the Si--SiO.sub.2 interface compared to traditional methods. The resulting gate dielectrics exhibit reduced charge trapping, lower stress-induced leakage current, and enhanced resistance to interface state generation under electrical stress.
Another significant patent by Yen is "Integrated circuit self-aligning process and apparatus." This invention focuses on alignment structures in gaps between patterned features, such as polysilicon wordlines or metal contacts. These structures have a selective effect on various processes, promoting self-alignment during ion implants, formation of via cuts, and the polycide process for composite layered gates. The alignment structures improve the manufacturing process by increasing the process window for code programming and minimizing errors during ion implantation.
Career Highlights
Lee-Wei Yen is currently associated with Macronix International Co., Ltd., where he continues to innovate in semiconductor technologies. His work has been instrumental in advancing the capabilities of integrated circuits and enhancing the performance of electronic devices.
Collaborations
Throughout his career, Lee-Wei Yen has collaborated with notable colleagues, including Shi-Chung Sun and Chun-Hon Chen. These collaborations have contributed to the successful development of his patented technologies.
Conclusion
Lee-Wei Yen's contributions to the field of semiconductor technology through his innovative patents have significantly advanced the industry. His work continues to influence the development of high-performance electronic devices.