Lee Haen

Title: Innovations by Inventor Lee Haen

Introduction

Lee Haen is a notable inventor based in Phoenix, AZ (US). She has made significant contributions to the field of substrate support systems, holding a total of 2 patents. Her work focuses on enhancing the efficiency and effectiveness of substrate handling in various applications.

Latest Patents

One of Lee Haen's latest patents is a substrate support system designed for reduced autodoping and backside deposition. This innovative system comprises a substrate holder with multiple passages extending between its top and bottom surfaces. The substrate holder supports the peripheral portion of the substrate backside, creating a thin gap between the substrate and the holder. A hollow support member is integrated to provide support to the underside and is configured to convey gas upward into the passages of the substrate holder. The upwardly conveyed gas flows into the gap, either moving outward and upward around the substrate edge to inhibit backside deposition of reactant gases or downward through passages that do not lead back into the hollow support member, effectively sweeping out-diffused dopant atoms away from the substrate backside.

Career Highlights

Lee Haen is currently employed at Asm America, Inc., where she continues to develop innovative solutions in her field. Her expertise and dedication have positioned her as a key player in the advancement of substrate support technologies.

Collaborations

Lee has collaborated with notable coworkers, including Matt G Goodman and Jereon Stoutyesdijk, contributing to a dynamic and innovative work environment.

Conclusion

Lee Haen's contributions to substrate support systems exemplify her commitment to innovation and excellence in her field. Her patents reflect a deep understanding of the complexities involved in substrate handling, making her a valuable asset to Asm America, Inc.