This inventor holds 2 USPTO granted patents. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2022-2023.
Company Filing History:
Years Active: 2022-2023
Title: Innovations by Lee-Chun Chen in Semiconductor Fabrication
Introduction
Lee-Chun Chen is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor fabrication, holding a total of 2 patents. His work focuses on methods for detecting environmental parameters in semiconductor fabrication facilities, which are crucial for maintaining the quality and efficiency of semiconductor production.
Latest Patents
Lee-Chun Chen's latest patents include innovative methods for detecting environmental parameters in semiconductor fabrication facilities. The first patent describes a semiconductor fabrication facility (FAB) that includes a group of processing tools and a number of sampling tubes connecting these tools. It features a sampling station equipped with a connection port, a valve manifold box, and a controller. The valve manifold box is designed to switch a gas sample from one of the processing tools to the connection port, while the controller manages the connection of the valve manifold box and the sampling tubes. Additionally, the FAB incorporates a metrology module that performs measurements related to the gas sample.
The second patent also focuses on a semiconductor fabrication facility. It describes a sampling station connected to processing tools and a detection vehicle that is detachably connected to the sampling station. This detection vehicle includes a metrology module that measures parameters related to the gas sample delivered from one of the processing tools. Furthermore, the FAB is equipped with a control system that issues warnings when the measured parameters fall outside acceptable ranges.
Career Highlights
Lee-Chun Chen is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading organization in the semiconductor industry. His work has been instrumental in advancing technologies that enhance the efficiency and reliability of semiconductor manufacturing processes.
Collaborations
Some of Lee-Chun Chen's notable coworkers include Chia-Lin Hsu and Yi-Chien Yang. Their collaborative efforts contribute to the innovative environment at Taiwan Semiconductor Manufacturing Company Limited.
Conclusion
Lee-Chun Chen's contributions to semiconductor fabrication through his patents demonstrate his expertise and commitment to innovation in the field. His work not only enhances the manufacturing process but also ensures the quality of semiconductor products.