Lawrence S Green

Title: Innovative Contributions of Lawrence S Green in Semiconductor Technology

Introduction

Lawrence S Green, a notable inventor based in Los Angeles, CA, has made significant contributions to the field of semiconductor technology. With a total of two patents to his name, Green has focused his innovations on improving processes in photomicrolithography, ultimately enhancing the efficiency and alignment accuracy in semiconductor fabrication.

Latest Patents

One of Green's notable patents is the "High Speed Alignment Method for Wafer Stepper." This invention revolutionizes the step-and-repeat exposure system by incorporating a method for achieving high-speed die-by-die alignment. This advancement increases throughput by allowing the wafer to be moved to a target position to view alignment targets prior to exposure, thereby significantly decreasing alignment time at each die site.

Another impactful patent from Green is the "Automatic Wafer Alignment Technique." This technique is designed to pre-align a wafer accurately in step-and-repeat photomicrolithographic exposure systems. It utilizes a search technique that begins at the most likely target position and optimizes the global targets used for prealignment. The methodology of digitizing video images and correlating potential target edges enhances the precision of wafer alignment before exposure.

Career Highlights

Lawrence S Green is currently associated with Tre Semiconductor Equipment Corporation, where he continues to innovate and influence the field of semiconductor manufacturing. His work emphasizes the importance of precision and speed in the wafer alignment process, crucial for effective semiconductor production.

Collaborations

Throughout his career, Green has collaborated with several distinguished professionals, including Boris Meshman and Thomas A Kerekes. These collaborations have contributed to the development and refinement of his patented technologies, showcasing the collaborative spirit often essential in technological advancement.

Conclusion

Lawrence S Green’s inventions reflect a commitment to improving semiconductor technologies through innovative alignment methods. His contributions through patents significantly enhance efficiency in wafer processing, underscoring the vital role inventors play in driving technological progress within the industry.