Company Filing History:
Years Active: 1987-1998
Title: Innovations by Lawrence H Lin
Introduction
Lawrence H Lin is a notable inventor based in Alamo, CA (US). He holds a total of 5 patents that showcase his contributions to the field of inspection systems and optical technologies. His work has significantly advanced the methods used for high-speed and high-sensitivity inspections.
Latest Patents
One of his latest patents is a method for high-speed, high-detection sensitivity inspection. This innovative patterned specimen inspection system combines the advantages of die to statistical image (DSI) inspection mode with the inspection speed of optical pattern filtering (OPF) mode. The invention allows for the production of a patterned specimen wafer image using coherent optical spatial frequency filtering, enhancing defect detection through pixel comparison. This method increases the inspection speed of the DSI mode, making it comparable to the OPF mode by utilizing a larger unit pixel size.
Another significant patent involves an inspection system with an in-lens, off-axis illuminator. This system employs a beam of monochromatic light that strikes a specimen wafer at an angle, producing diffracted light with a broad spatial frequency spectrum. The system can be optimized to collect spatial frequencies representative of anticipated defect sizes, enhancing the accuracy of defect detection.
Career Highlights
Throughout his career, Lawrence has worked with various companies, including Insystems, Inc. and Optical Specialties, Inc. His experience in these organizations has contributed to his expertise in developing advanced inspection technologies.
Collaborations
Lawrence has collaborated with notable individuals in the field, including Robert B Howe and Victor A Scheff. These partnerships have further enriched his work and innovations.
Conclusion
Lawrence H Lin's contributions to the field of inspection systems and optical technologies are significant. His innovative patents and collaborations reflect his dedication to advancing inspection methods and enhancing defect detection capabilities.
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