Location History:
- Dallas, TX (US) (1977)
- Richarson, TX (US) (1985)
- Richardson, TX (US) (1985 - 2000)
Company Filing History:
Years Active: 1977-2000
Title: Innovations by Lawrence D Dyer in Micromechanical Device Fabrication
Introduction
Lawrence D Dyer is a prominent inventor based in Richardson, Texas, recognized for his contributions to the field of micromechanical device fabrication. With an impressive portfolio of 14 patents, Dyer has significantly advanced the methods and technologies used in semiconductor and photolithography processes.
Latest Patents
Among his notable inventions, Dyer holds patents for two innovative methods aimed at reducing wafer particles during fabrication processes. The first patent describes a method of fabricating a monolithic device by carefully selecting the composition of multiple layers of photoresist. This invention utilizes a superhard protective layer, such as Diamond-Like Carbon (DLC) or Titanium Tungsten (TiW), which is deposited over the partially fabricated device before a partial saw process. This protective layer reduces defects in the underlying photoresist layers and allows for effective etching of particles using a 6% buffered hydrofluoric acid (BHF) solution, thereby improving the yield of micromechanical devices.
The second patent, also focused on reducing wafer particles after a partial saw, emphasizes the selection of compatible photoresist layers to prevent defects that could damage an underlying micromechanical device during the etching process. This method allows for a stronger hydrofluoric acid etch, facilitating the removal of debris and damaged portions of the underlying CMOS layer, thus enhancing the overall yield.
Career Highlights
Dyer currently works at Texas Instruments Corporation, where he has leveraged his extensive knowledge and experience in semiconductor technology to contribute towards innovative solutions and advancements in micromechanical devices. His work has played a crucial role in enhancing production efficiency and product reliability.
Collaborations
Throughout his career, Dyer has collaborated with fellow innovators such as Jerry B Medders and Anderson D McGregor. These partnerships have enriched his research and development efforts, leading to improved methodologies and successful patent applications in the intricate world of microsystems.
Conclusion
Lawrence D Dyer's innovative spirit and dedication to advancing micromechanical device fabrication have solidified his reputation as a leading inventor in the industry. His patents reflect a commitment to improving manufacturing processes and outcomes, contributing to the evolution of technology in semiconductor applications. His ongoing work at Texas Instruments Corporation continues to inspire future advancements in the field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.