The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 21, 1997
Filed:
Jan. 04, 1994
Vikki S Simpson, Sherman, TX (US);
Tom G Gullett, Sherman, TX (US);
Jerry B Medders, Van Alstyne, TX (US);
Arthur R Clark, Sherman, TX (US);
Bobby R Robbins, Denison, TX (US);
Danny R Newton, Sherman, TX (US);
Lawrence D Dyer, Richardson, TX (US);
Douglas W Bilderback, Denison, TX (US);
Clyde A King, Bells, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
An edge polishing system (20, 320) and method for edge polishing semiconductor wafers is disclosed. The system (20, 320) includes a loader (22, 326), a polisher (24, 328), an unloader (26, 330), and a controller (28, 335). The method includes the steps of loading wafers (28), and spacers (30) into a loader (22) to form a stack (36), moving the stack (36) into a polisher (24) and causing polisher (24) to polish the stack (36), then moving the stack (36) to an unloader (26), which semiautomatically removes the wafers (28) and spacers (30). The system (20) may include a controller (28) for entering the appropriate commands.