Company Filing History:
Years Active: 1990-2010
Title: Larry Steven Zurbrick: Innovator in Non-Contact Measurement Systems
Introduction
Larry Steven Zurbrick is a notable inventor based in San Jose, California. He holds five patents that showcase his contributions to the field of non-contact measurement systems and optical property modification. His innovative work has implications in various technological applications.
Latest Patents
One of Zurbrick's latest patents involves systems configured to perform a non-contact method for determining a property of a specimen. This system includes a focused biasing device that provides a stimulus to a focused spot on the specimen. Additionally, it features a sensor that measures a parameter of a measurement spot on the specimen, which overlaps with the focused spot. A processor is also included to determine the property of the specimen from the measured parameter. Another significant patent focuses on systems and methods for modifying a reticle's optical properties. This invention utilizes inspection results from multiple wafers or predictions from a lithographic model to adjust the optical properties at specific locations on the reticle. Techniques such as using a femto-second laser to modify optical properties can widen the process window for various applications.
Career Highlights
Zurbrick has worked with prominent companies in the technology sector, including KLA-Tencor Technologies Corporation and Drexler Technology Corporation. His experience in these organizations has contributed to his expertise in developing innovative measurement systems.
Collaborations
Throughout his career, Zurbrick has collaborated with notable professionals, including Robert L. Hazel and Sterling G. Watson. These collaborations have likely enriched his work and led to advancements in his field.
Conclusion
Larry Steven Zurbrick's contributions to non-contact measurement systems and optical property modification highlight his innovative spirit and technical expertise. His patents reflect a commitment to advancing technology in meaningful ways.