Kla-Tencor Technologies Corporation

Drexler Technology Corporation

Larry Steven Zurbrick

Ady Levy

Stanley E Stokowski

Chris Mack

Zain Saidin

Sterling G Watson

Harold William Lehon

Robert L Hazel

Systems configured to perform a non-contact method for determining a property of a specimen are provided. One system configured to perform a non-contact method for determining a property of a specimen includes a focused biasing device configured to provide a stimulus to a focused spot on the specimen. The system also includes a sensor configured to measure a parameter of a measurement spot on the specimen. The measurement spot overlaps the focused spot. The system further includes a processor configured to determine the property of the specimen from the parameter.

Systems configured to perform a non-contact method for determining a property of a specimen

Disclosed are systems and methods for modifying a reticle. In general, inspection results from a plurality of wafers or prediction results from a lithographic model are used to individually decrease the dose or any other optical property at specific locations of the reticle. In one embodiment, any suitable optical property of the reticle is modified by an optical beam, such as a femto-second laser, at specific locations on the reticle so as to widen the process window for such optical property. Examples of optical properties include dose, phase, illumination angle, and birefringence. Techniques for adjusting optical properties at specific locations on a reticle using an optical beam may be practiced for other purposes besides widening the process window.

Systems and methods for modifying a reticle's optical properties

An inspection system to inspect structures on a substrate. A generator directs a primary beam at the substrate along a selectable angle, thereby producing a secondary beam having properties that are characteristic of the structures on the substrate. At least one of the substrate and the primary beam are scanned relative to the other at a selectable speed. A sensor receives the secondary beam and provides analog signals having properties that are characteristic of the secondary beam. An analog to digital converter receives the analog signals and provides digital signals having properties that are characteristic of the analog signals. A controller receives the digital signals and determines the properties of the structures on the substrate based at least in part on the properties of the digital signals.

Effective scanning resolution enhancement

A data storage medium having a pattern representing data bits arranged in a plurality of interlocked triangularly shaped tracks. The medium may be a prerecorded optical storage material having a set of optically contrasting marks arranged in the tracks. The track width increases from a start point to an end point at a constant rate that depends on the maximum allowable angle of skew. The medium, which can be prerecorded with the pattern using exposure to actinic radiation through a like-patterned master, can have either a card, tape or drum format.

High density data track layout for storage media

A data logger which incorporates a laser diode and focusing optics for logging data pits in optical recording media. The focusing optics may be attached to a spring assembly and caused to oscillate by electromagnetic or mechanical means. As the optical elements oscillate, the focused beam dithers above and below the surface of the recording media. When the laser beam focal region is in the plane of the recording surface a pit or deformation is formed in the surface. Relative motion is provided between the recording surface and the laser beam spot for further writing on the recording surface.

Growing community of inventors

San Jose, CA, United States of America

Larry Steven Zurbrick