Company Filing History:
Years Active: 1989-2003
Title: Innovations of Larry R. Lane
Introduction
Larry R. Lane is a notable inventor based in San Jose, California. He holds 2 patents that contribute significantly to the field of semiconductor technology. His work focuses on advanced materials and processes that enhance the performance of integrated circuits.
Latest Patents
One of his latest patents is titled "High magnesium content copper magnesium alloys as diffusion barriers." This invention pertains to systems and methods for simultaneously producing a diffusion barrier and a seed layer used in integrated circuit metallization. The process involves depositing copper-magnesium (Cu–Mg) alloys with relatively high levels of magnesium, which self-form a magnesium oxide (MgO) based barrier layer at the substrate interface. This innovation eliminates the need for a separate operation for barrier deposition, thus streamlining the manufacturing process.
Another significant patent by Lane is the "Rapid thermal CVD apparatus." This invention describes a chemical vapor deposition apparatus for coating semiconductor wafers. In this apparatus, the wafer is held face down in the reaction chamber and heated from its backside to temperatures exceeding 1000 degrees Celsius. The design includes cylindrical lamps arranged in a radial pattern to improve heating uniformity, which is crucial for the selective tungsten process.
Career Highlights
Throughout his career, Larry R. Lane has worked with prominent companies such as Varian Associates, Inc. and Novellus Systems Incorporated. His contributions to these organizations have been instrumental in advancing semiconductor manufacturing technologies.
Collaborations
Lane has collaborated with notable coworkers, including Daniel L. Brors and Mark W. Goldsborough. Their combined expertise has fostered innovation in the field of semiconductor technology.
Conclusion
Larry R. Lane's contributions to the field of semiconductor technology through his patents and career achievements highlight his role as a significant inventor. His work continues to influence advancements in integrated circuit manufacturing.