Larry Flack Thompson

Title: The Innovative Journey of Larry Flack Thompson

Introduction

Larry Flack Thompson is a renowned inventor based in Millington, NJ, USA, with an impressive portfolio of two patents. His work primarily focuses on advancements in lithographic processing and materials, showcasing his commitment to solving complex challenges in the field.

Latest Patents

One of Larry's latest patents addresses the issues encountered in the fabrication of devices, specifically regarding the loss of linewidth control for chemically amplified resists. The patent reveals that surface reactions with amines in the processing environment contribute to this loss, leading to undesirable reactions during exposure. To solve this problem, Larry proposes employing an acid-containing barrier layer on the resist.

Another significant patent involves radiation-sensitive materials and devices, focusing on deep ultraviolet resists. This patent describes a composition that undergoes decomposition to form an acid, which then interacts with a polymer containing a chain scission inducing monomer like sulfonyl units. The method allows the irradiated portions of the resist material to become soluble in ionic solvents while keeping the unirradiated portions intact. His exemplary composition features poly(t-butoxycarbonyloxystyrenesulfone) and 2,6-dinitrobenzyl-p-toluene sulfonate, which cleverly plays a role in generating sulfonic acid upon irradiation.

Career Highlights

Larry Flack Thompson's career is marked by significant contributions to leading companies in the technology sector, including Lucent Technologies Inc. and AT&T Bell Laboratories. His work has influenced the development of materials and processes that are crucial in modern lithography and semiconductor manufacturing.

Collaborations

Throughout his career, Larry has collaborated with esteemed professionals in the field, including notable coworkers like Elsa Reichmanis and Edwin Arthur Chandross. These collaborations have further enhanced his innovative contributions and have led to significant advancements within the industry.

Conclusion

Larry Flack Thompson's contributions to the field of innovation in lithographic processing demonstrate his expertise as an inventor. With two patented inventions that address critical challenges in material science, he continues to pave the way for future advancements. His professional journey is characterized by collaboration and an unwavering commitment to innovation, solidifying his place as a pivotal figure in the realm of technology.