Company Filing History:
Years Active: 2025
Title: The Innovative Contributions of Kyunjin Lee
Introduction
Kyunjin Lee is a notable inventor based in Suwon-si, South Korea. He has made significant contributions to the field of plasma process equipment, particularly with his innovative patent that addresses arcing diagnosis.
Latest Patents
Kyunjin Lee holds a patent for an "Apparatus for arcing diagnosis, plasma process equipment including the same, and arcing diagnosis method." This apparatus includes first and second VI sensors, an optical sensor, and an arcing detector. The first VI sensor is strategically placed in a power filter or on a power supply line connected to a heater in the lower electrode of a process chamber where plasma processes occur. It senses harmonics generated from a power supply and outputs a signal. The optical sensor measures the intensity of light from the process chamber, while the second VI sensor detects harmonics from a power supply connected to the upper electrode. The arcing detector utilizes these signals to determine if arcing occurs, showcasing a sophisticated approach to enhancing plasma processing technology. Kyunjin Lee has 1 patent to his name.
Career Highlights
Kyunjin Lee is currently employed at Samsung Electronics Co., Ltd., a leading global technology company. His work focuses on advancing technologies that improve the efficiency and reliability of plasma processes.
Collaborations
Kyunjin Lee collaborates with talented colleagues, including Changsoon Lim and Youngdo Kim, who contribute to the innovative environment at Samsung Electronics.
Conclusion
Kyunjin Lee's contributions to the field of plasma process equipment through his innovative patent demonstrate his commitment to advancing technology. His work not only enhances the efficiency of plasma processes but also reflects the collaborative spirit of innovation at Samsung Electronics.