Samsung Electronics Co., Ltd.

Kyunjin Lee

Kyunghyun Kim

Sungho Jang

Youngdo Kim

Sangki Nam

Daewon Kang

Chansoo Kang

Jonghun Pi

Changsoon Lim

An apparatus includes first and second VI sensors, an optical sensor, and an arcing detector. The first VI sensor is disposed in a power filter or on a power supply line connected to a heater disposed in a lower electrode of a process chamber in which a plasma process is performed. The first VI sensor senses a harmonic generated from a first power supply supplying power to the lower electrode and outputs a first signal. The optical sensor senses an intensity of light generated from the process chamber and outputs a second signal. The second VI sensor is disposed on a power supply line connected to an upper electrode and senses a harmonic generated from a second power supply supplying power to the upper electrode and outputs a third signal. The arcing detector determines whether arcing occurs based on one or more of the first, second, and third signals.

Apparatus for arcing diagnosis, plasma process equipment including the same, and arcing diagnosis method

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Suwon-si, South Korea

Kyunjin Lee