This inventor holds 1 USPTO granted patent. Top assignees: Dongwoo Fine-Chem, Samsung Electronics Ltd.. Active years: 2026.
Company Filing History:
Years Active: 2026
Title: Kyungmo Sung - Innovator in Etchant Composition
Introduction
Kyungmo Sung is an inventor based in Suwon-si, South Korea. He has made contributions to the field of etching technology, particularly focusing on silicon and silicon germanium. His innovative approach aims to enhance the efficiency and effectiveness of etching processes.
Latest Patent Applications
Kyungmo Sung's notable patent application is titled "ETCHANT COMPOSITION FOR ETCHING SILICON AND SILICON GERMANIUM, AND PREPARATION METHOD OF PATTERN USING THE SAME." This application describes an etchant composition that includes an oxidizing agent, a fluorine-based compound, a surfactant represented by Chemical Formula 1 or 2, and water. The surfactant is included in an amount of 5% to 40% by weight based on 100% by weight of the etchant composition. This innovative composition aims to improve the etching process for silicon and silicon germanium materials.
Conclusion
Kyungmo Sung's work in developing etchant compositions showcases his commitment to advancing technology in the semiconductor industry. His contributions may pave the way for more efficient manufacturing processes in the future.