Kyung-Ha Kim

Title: The Innovations of Kyung-Ha Kim

Introduction

Kyung-Ha Kim is an accomplished inventor based in Cupertino, CA. She has made significant contributions to the field of semiconductor technology. Her innovative work has led to the development of a unique patent that enhances the processing methods for semiconductor structures.

Latest Patents

Kyung-Ha Kim holds a patent for a "Metal contact landing structure." This patent outlines processing methods that may be performed to form semiconductor structures, including three-dimensional memory structures. The methods involve forming a plasma of a fluorine-containing precursor in a remote plasma region of a processing chamber. Additionally, the methods include contacting a semiconductor substrate with effluents of the plasma, which is housed in a processing region of the chamber. The process also selectively cleans exposed nitride materials with the effluents of the plasma and subsequently deposits a cap material over the cleaned nitride material. The cap material is selectively deposited on the nitride material relative to exposed regions of a dielectric material. This innovative approach has the potential to improve semiconductor manufacturing processes.

Career Highlights

Kyung-Ha Kim has made notable strides in her career, particularly through her work at Micro Materials Inc. Her expertise in semiconductor technology has positioned her as a key player in the industry. With her patent, she has demonstrated her ability to innovate and contribute to advancements in technology.

Collaborations

Kyung-Ha Kim has collaborated with talented individuals in her field, including coworkers Sung Kwan Kang and Gill Yong Lee. These collaborations have likely fostered an environment of creativity and innovation, further enhancing the impact of her work.

Conclusion

Kyung-Ha Kim's contributions to semiconductor technology through her patent and work at Micro Materials Inc. highlight her role as a significant inventor in the industry. Her innovative methods for processing semiconductor structures pave the way for advancements in technology.