This inventor holds 2 USPTO granted patents. Top assignee: Applied Materials, Inc.. Active years: 2020.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Belmont, CA (US) (2020)
- Santa Clara, CA (US) (2020)
Company Filing History:
Years Active: 2020
Title: Kyoungjin Lee: Innovator in EUV Technologies
Introduction
Kyoungjin Lee is a prominent inventor based in Belmont, CA (US). He has made significant contributions to the field of EUV (Extreme Ultraviolet) technologies, holding a total of 2 patents. His work focuses on innovative methods for patterning substrates, which are crucial in the semiconductor manufacturing process.
Latest Patents
Kyoungjin Lee's latest patents include "EUV resist patterning using pulsed plasma" and "Uniform EUV photoresist patterning utilizing pulsed plasma process." The first patent describes a method where a coating layer is deposited on a patterned feature on a substrate. A second portion of the substrate outside the patterned feature is etched. This process is performed in a single pulsed plasma operation, utilizing at least one of a pulsed source power signal and a pulsed bias power signal. The second patent outlines a method for forming features in a material layer using EUV technologies. It involves disposing a patterned photoresist layer on a mask layer, forming a compensatory layer along the sidewalls of the patterned photoresist layer, and etching the mask layer through openings with modified widths.
Career Highlights
Kyoungjin Lee is currently employed at Applied Materials, Inc., a leading company in the semiconductor equipment industry. His work at Applied Materials has positioned him as a key player in advancing EUV technology, which is essential for the production of smaller and more efficient semiconductor devices.
Collaborations
Kyoungjin has collaborated with notable colleagues, including Byungkook Kong and SeungHyun Park. Their combined expertise contributes to the innovative projects at Applied Materials, enhancing the development of cutting-edge technologies in the semiconductor field.
Conclusion
Kyoungjin Lee's contributions to EUV technologies through his patents and work at Applied Materials, Inc. highlight his role as an influential inventor in the semiconductor industry. His innovative approaches continue to shape the future of semiconductor manufacturing.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile