This inventor holds 1 USPTO granted patent. Top assignee: Samsung Electronics Co., Ltd.. Active years: 2019.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2019
Title: Kwang-Youb Heo: Innovator in Plasma Processing Technology
Introduction
Kwang-Youb Heo is a notable inventor based in Yongin, South Korea. He has made significant contributions to the field of semiconductor manufacturing through his innovative patent. His work focuses on enhancing plasma processing methods, which are crucial for the production of semiconductor devices.
Latest Patents
Kwang-Youb Heo holds a patent for a "Plasma processing apparatus and method, and method of manufacturing semiconductor device using the same." This patent describes a plasma processing method where a substrate is loaded onto a substrate electrode within a chamber. The substrate has an object layer that is to be etched. A plasma generating power output is applied to form plasma within the chamber. A first bias power output is applied to the substrate electrode to perform a first etch stage on the object layer. Subsequently, a second bias power output, featuring a nonsinusoidal voltage waveform, is applied to the substrate electrode to execute a second etch stage on the object layer. This innovative approach enhances the efficiency and effectiveness of semiconductor device manufacturing.
Career Highlights
Kwang-Youb Heo is currently employed at Samsung Electronics Co., Ltd., a leading company in the electronics industry. His work at Samsung has allowed him to be at the forefront of technological advancements in semiconductor manufacturing. His expertise in plasma processing technology has positioned him as a valuable asset to the company.
Collaborations
Kwang-Youb Heo has collaborated with several talented individuals in his field, including Vasily Pashkovskiy and Sang-Heon Lee. These collaborations have fostered an environment of innovation and have contributed to the development of advanced technologies in semiconductor processing.
Conclusion
Kwang-Youb Heo is a distinguished inventor whose work in plasma processing technology has made a significant impact on semiconductor manufacturing. His innovative patent and contributions to Samsung Electronics Co., Ltd. highlight his role as a key player in the advancement of this critical technology.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile