This inventor holds 5 USPTO granted patents and 6 published patent applications. Top assignee: Psk Inc.. Active years: 2023-2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2023-2026
Title: Kwang Sung Yoo: Innovator in Substrate Processing Technology
Introduction
Kwang Sung Yoo is a prominent inventor based in Gyeonggi-do, South Korea. He has made significant contributions to the field of substrate processing, holding a total of four patents. His work focuses on developing advanced apparatuses and methods for treating substrates, which are essential in various technological applications.
Latest Patents
Among his latest patents, Kwang Sung Yoo has developed a "Substrate Processing Apparatus and Substrate Processing Method." This invention provides an apparatus designed for treating a substrate, featuring a chuck that supports the substrate, a gas supply unit for delivering process gas to the substrate's edge region, and an edge electrode that generates plasma from the gas. The edge electrode is uniquely designed with a ring shape and a groove that enhances its functionality.
Another notable patent is the "Apparatus for Treating Substrate and Method for Aligning Dielectric Plate Using the Same." This apparatus includes a housing that defines a treatment space, a gas supply unit, and a support unit with a chuck to hold the substrate. It also features a dielectric plate unit and an upper electrode unit, which work together to ensure precise treatment of the substrate.
Career Highlights
Kwang Sung Yoo has established himself as a key figure in substrate processing technology. His innovative designs and methods have contributed to advancements in the industry, making him a respected inventor among his peers.
Collaborations
He has collaborated with notable coworkers, including Geon Jong Kim and A Ram Kim, who have also contributed to the field of substrate processing. Their teamwork has fostered an environment of innovation and creativity.
Conclusion
Kwang Sung Yoo's contributions to substrate processing technology highlight his role as a leading inventor in this specialized field. His patents reflect a commitment to advancing technology and improving processes in substrate treatment.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile