Company Filing History:
Years Active: 2022-2024
Title: Kuotang Cheng: Innovator in Extreme Ultraviolet Mask Technology
Introduction
Kuotang Cheng is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly in the development of extreme ultraviolet (EUV) mask technology. With a total of three patents to his name, Cheng's work is pivotal in advancing the capabilities of modern lithography.
Latest Patents
Cheng's latest patents focus on the design and manufacturing methods of extreme ultraviolet masks. One of his notable inventions is an EUV mask that features a multilayer Mo/Si stack. This stack comprises alternating layers of molybdenum (Mo) and silicon (Si) that are disposed over a mask substrate. Additionally, a capping layer made of ruthenium (Ru) is placed over the multilayer stack, along with an absorber layer on top of the capping layer. The EUV mask is designed with a circuit pattern area and a particle attractive area, where the capping layer is exposed at the bottoms of patterns in the particle attractive area. This innovative design enhances the performance and reliability of EUV lithography.
Career Highlights
Cheng is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work at TSMC has positioned him as a key player in the development of advanced manufacturing technologies. His expertise in EUV mask technology has contributed to the company's reputation for innovation and excellence in semiconductor fabrication.
Collaborations
Cheng has collaborated with several talented individuals in his field, including Chih-Tsung Shih and Tsung-Chih Chien. These collaborations have fostered a productive environment for innovation and have led to significant advancements in semiconductor technology.
Conclusion
Kuotang Cheng's contributions to extreme ultraviolet mask technology exemplify the importance of innovation in the semiconductor industry. His patents and work at Taiwan Semiconductor Manufacturing Company Limited highlight his role as a leading inventor in this critical field.