This inventor holds 3 USPTO granted patents and 1 published patent application. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2018-2023.
Company Filing History:
Years Active: 2018-2023
Title: The Innovations of Kuo-Pin Chen: A Pioneer in Spin Dispenser Technology
Introduction
Kuo-Pin Chen, a prominent inventor based in Zhubei, Taiwan, has made significant contributions to the field of semiconductor manufacturing. With a total of three patents to his name, Chen's work is vital for enhancing the efficiency and quality of substrate coating processes in the industry.
Latest Patents
One of Kuo-Pin Chen's groundbreaking patents is the Spin Dispenser Module Substrate Surface Protection System. This innovative spin dispenser module features a cup with a basin and sidewalls along with an exhaust. Inside the cup is a rotatable platform designed to hold and rotate substrates while a liquid dispenser positioned above dispenses a liquid coating material onto the substrate.
Additionally, the module is equipped with one or more ejector inlets strategically placed over the rotatable platform. These ejector inlets are connected to a negative pressure source and may be customizable, allowing for translatability and rotation with adjustable suction pressure. The ejectors operate post-coating to prevent the deposition of suspended organic compounds on the substrate, ensuring a high-quality finish.
Career Highlights
Kuo-Pin Chen is currently associated with Taiwan Semiconductor Manufacturing Company (TSMC), a leader in the semiconductor industry. His technological innovations have not only advanced the company's manufacturing capabilities but have also set new standards within the field.
Collaborations
Throughout his career, Kuo-Pin Chen has collaborated with esteemed industry colleagues, including Ching-Hai Yang and Yao-Hwan Kao. Together, they have pushed the boundaries of technological innovation, collectively working towards optimizing semiconductor manufacturing processes.
Conclusion
Kuo-Pin Chen stands out as a trailblazer in innovative approaches to substrate surface protection in semiconductor manufacturing. His patents, particularly the Spin Dispenser Module Substrate Surface Protection System, reflect his commitment to excellence and the continuous improvement of industry standards. With ongoing collaborations and a robust portfolio of patents, Chen's work is poised to have a lasting impact on the field.