Company Filing History:
Years Active: 2005-2006
Title: **Innovative Contributions of Inventor Kunihiko Koroyasu**
Introduction
Kunihiko Koroyasu, an accomplished inventor based in Kudamatsu, Japan, has made significant strides in the field of plasma processing technology. With a total of two patents to his name, Koroyasu's innovations reflect a commitment to advancing technology while minimizing contamination effects in processing environments.
Latest Patents
His latest patents include a **Plasma Processing Apparatus** and a **Plasma Etching Method**. The plasma processing apparatus is designed to suppress the production of contaminants within the plasma processing chamber. It features a workpiece processing setup where plasma is created, and one or more grounded metal surfaces come into contact with this plasma. Notably, these surfaces are coated with a plasma-resistant polymeric material, enhancing performance with specific relationships between the relative dielectric constant and the thickness of the material. Additionally, the invention includes a protecting layer made of a water-absorbing resin that adheres to surfaces in the chamber through a unique swelling and shrinkage process.
The **Plasma Etching Method** and apparatus are designed to optimally etch samples by supplying processing gas from a strategically arranged shower plate. By transforming this gas into plasma, the method applies RF power between the sample stage and an electrode to energize charged particles for effective etching. This innovative process not only etches the sample but also neutralizes charged particles that enter the processing gas supply holes, thereby preventing abnormal discharge and reducing foreign matter generation.
Career Highlights
Koroyasu currently works at Hitachi High Technologies Corporation, where his expertise in plasma processing plays a critical role in advancing the company's technological capabilities. His work emphasizes the practical applications of plasma technology in various industries and highlights his importance as an innovator.
Collaborations
Throughout his career, Kunihiko Koroyasu has collaborated with esteemed colleagues such as Muneo Furuse and Tomoyuki Tamura. Together, they have collectively contributed to the advancements in plasma processing, showcasing their passion for innovation and collaborative research in technology.
Conclusion
In summary, Kunihiko Koroyasu represents the ingenuity and forward-thinking spirit of modern inventors. His patented technologies, particularly in plasma processing, underscore the potential for innovation to drive efficiency and effectiveness in technological applications. As the field continues to evolve, Koroyasu's contributions will undoubtedly inspire further developments and collaborations in the years to come.