Location History:
- Taina, TW (2000)
- Tainan Shien, TW (2003)
- Tainan, TW (2003 - 2004)
Company Filing History:
Years Active: 2000-2004
Title: Kun-Yi Liu: Innovator in Semiconductor Technology
Introduction
Kun-Yi Liu is a prominent inventor based in Tainan, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. His work focuses on improving photolithography processes and verification methods in semiconductor fabrication.
Latest Patents
One of his latest patents is the "Verification Photomask." This invention discloses a mask designed for process window verification purposes when switching between fabrication equipment. It also serves for optical proximity correction (OPC) verification. The mask features device areas separated by scribe lines, with integrated verification patterns that include proximity patterns, photoresist-spacing patterns, and polysilicon end cap patterns. Additionally, a method for creating the mask and a semiconductor device utilizing this mask are disclosed.
Another notable patent is the "Dielectric ARC Scheme to Improve Photo Window in Dual Damascene Process." This invention relates to a fabrication method for semiconductor integrated circuit devices. It aims to enhance the photolithography processing window of a multi-layered dual damascene process by employing a dielectric anti-reflective coating (DARC) made of multiple layers of silicon oxynitride. By varying the thickness and dielectric constant of these layers, the optical properties of light absorption, refractive indices, and light reflection are optimized.
Career Highlights
Kun-Yi Liu is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His innovative work has positioned him as a key figure in advancing semiconductor fabrication techniques.
Collaborations
He has collaborated with notable coworkers, including Ching-Ming Chen and Chin-Chuan Hsieh, contributing to various projects and innovations in the semiconductor field.
Conclusion
Kun-Yi Liu's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor. His work continues to impact the industry positively, paving the way for advancements in semiconductor fabrication processes.