This inventor holds 2 USPTO granted patents. Top assignee: Dms Co., Ltd.. Active years: 2011-2012.
Company Filing History:
Years Active: 2011-2012
Title: Innovations of Kun Joo Park in Plasma Technology
Introduction
Kun Joo Park is a notable inventor based in Gyeonggi-do, South Korea. He has made significant contributions to the field of plasma technology, particularly in the development of endpoint detection devices for plasma reactors. With a total of 2 patents, his work is instrumental in enhancing real-time control in various industrial applications.
Latest Patents
Kun Joo Park's latest patents include an endpoint detection device for realizing real-time control of plasma reactors, a plasma reactor equipped with this endpoint detection device, and a method for endpoint detection. The endpoint detection device comprises several key components, including an OES data operation unit, a data selector, a product generator, a support vector machine (SVM), and an endpoint determiner. The OES data operation unit processes reference OES data through normalization and principal component analysis (PCA). The data selector identifies specific linear reference loading vectors, while the product generator outputs at least one reference product value. The SVM performs regression analysis to produce a prediction product value. Finally, the endpoint determiner detects the endpoint of a process wafer etch or deposition and outputs a detection signal.
Career Highlights
Kun Joo Park is currently employed at DMS Co., Ltd., where he continues to innovate in the field of plasma technology. His work has been pivotal in advancing the capabilities of plasma reactors, making them more efficient and reliable for various applications.
Collaborations
Throughout his career, Kun Joo Park has collaborated with notable colleagues, including Kee Hyun Kim and Kwang Hoon Han. These collaborations have fostered a productive environment for innovation and development in their respective fields.
Conclusion
Kun Joo Park's contributions to plasma technology through his patents and collaborative efforts highlight his role as a significant inventor in the industry. His work continues to influence advancements in real-time control of plasma reactors, showcasing the importance of innovation in technology.