Kuan-Ting Liu

Title: Innovations of Kuan-Ting Liu in Semiconductor Processing

Introduction

Kuan-Ting Liu is a prominent inventor based in Stanford, California, known for his significant contributions to semiconductor processing technologies. With a total of four patents to his name, Liu has developed innovative methods that enhance the efficiency and precision of semiconductor manufacturing processes.

Latest Patents

One of Liu's latest patents focuses on "Reducing aspect ratio dependent etch with direct current bias pulsing." This invention relates to a system used in semiconductor device manufacturing, specifically aimed at synchronizing and controlling the delivery of an RF bias signal and a pulsed voltage waveform to electrodes within a plasma processing chamber. The methods disclosed are designed to minimize or eliminate microloading effects during the processing of small dimension features with varying densities across a substrate. This technology improves the control of plasma characteristics and ion energy distribution, leading to greater precision in forming high-aspect ratio features through reactive ion etching.

Another notable patent by Liu is "Selective carbon deposition on top and bottom surfaces of semiconductor substrates." This patent describes methods for providing a substrate to a reaction chamber, where trenches on the substrate receive a carbon-containing layer. The deposition process involves generating a deposition plasma with specific electron temperature conditions, resulting in a carbon layer with a thickness ratio greater than 3:1 on the top and bottom surfaces of the trenches. This innovation enhances the structural integrity and performance of semiconductor devices.

Career Highlights

Kuan-Ting Liu is currently employed at Applied Materials, Inc., a leading company in the semiconductor manufacturing industry. His work at Applied Materials has allowed him to push the boundaries of semiconductor technology, contributing to advancements that are critical for modern electronics.

Collaborations

Liu has collaborated with notable colleagues, including Chung Liu and Deyang Li, who have also made significant contributions to the field of semiconductor processing. Their combined expertise fosters an environment of innovation and excellence in their projects.

Conclusion

Kuan-Ting Liu's innovative patents and contributions to semiconductor processing exemplify the importance of research and development in advancing technology. His work continues to influence the semiconductor industry, paving the way for future innovations.