Krishna Shrinivasan

Title: Innovations by Krishna Shrinivasan in Semiconductor Technology

Introduction

Krishna Shrinivasan is a notable inventor based in San Jose, CA, who has made significant contributions to the field of semiconductor technology. His innovative work focuses on improving the curing process of semiconductor wafers, which is crucial for the manufacturing of electronic devices.

Latest Patents

One of Krishna Shrinivasan's key patents is titled "Single-chamber sequential curing of semiconductor wafers." This invention relates to the curing of semiconductor wafers and involves cure chambers that contain multiple cure stations, each equipped with one or more UV light sources. The wafers are cured through sequential exposure to these light sources at each station. In certain embodiments, the wafers remain stationary during exposure, while in others, there is relative movement between the light source and the wafer. The invention also allows for independent modulation of cross-linking, density, and stress of the cured material by controlling the wafer temperature and UV intensity.

Career Highlights

Krishna Shrinivasan is associated with Novellus Systems Incorporated, a company known for its advanced semiconductor manufacturing equipment. His work at Novellus has positioned him as a key player in the development of innovative technologies that enhance the efficiency and effectiveness of semiconductor production.

Collaborations

Throughout his career, Krishna has collaborated with notable colleagues, including Feng Wang and George D Kamian. These collaborations have contributed to the advancement of semiconductor technologies and have fostered a culture of innovation within the industry.

Conclusion

In summary, Krishna Shrinivasan's contributions to semiconductor technology, particularly through his patent on the curing of semiconductor wafers, highlight his role as an influential inventor in the field. His work continues to impact the efficiency of semiconductor manufacturing processes.