Koyo Tada

Title: Koyo Tada: Innovator in Phase Shift Measurement Technology

Introduction

Koyo Tada is a notable inventor based in Yokohama, Japan. He has made significant contributions to the field of measurement technology, particularly in the area of phase shift measurement. His innovative approach has led to the development of a unique measuring apparatus that enhances the efficiency of phase shift measurements.

Latest Patents

Koyo Tada holds 1 patent for his invention titled "Measuring apparatus and measuring method." This patent describes a phase shift amount measuring apparatus and method that allows for the simultaneous measurement of both the phase shift amount and the transmittance of a phase shift mask in a single measurement step. The apparatus utilizes a miniaturized monitor pattern and a shearing interferometer to achieve accurate results.

Career Highlights

Koyo Tada is currently employed at Lasertec GmbH, where he continues to work on advancing measurement technologies. His expertise in the field has positioned him as a key figure in the development of innovative solutions for complex measurement challenges.

Collaborations

Throughout his career, Koyo Tada has collaborated with talented individuals such as Hiroto Nozawa and Hideo Takizawa. These collaborations have fostered a creative environment that encourages the exchange of ideas and the development of cutting-edge technologies.

Conclusion

Koyo Tada's contributions to phase shift measurement technology exemplify the impact of innovation in the field. His work not only advances measurement techniques but also sets a foundation for future developments in the industry.