Kouzou Kawahara

Title: Kouzou Kawahara: Innovator in Substrate Processing Technology

Introduction

Kouzou Kawahara is a notable inventor based in Kumamoto, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of three patents. His work focuses on enhancing the efficiency and effectiveness of substrate processing apparatuses.

Latest Patents

Kouzou Kawahara's latest patents include a substrate processing apparatus with an electronic heater powered by a power feeding coil. This innovative apparatus features a rotary stage designed to hold a substrate, a rotary driver for rotation, and an electric heater connected to a power receiving coil. The design also incorporates a power feeding coil positioned to face the power receiving coil, allowing for efficient energy transfer through a radio-frequency power supply unit.

Another significant patent is a substrate processing apparatus that includes a rotary table for holding and rotating a substrate. This apparatus is equipped with an electronic component and a first electrode unit that rotates with the table. The design allows for effective power supply and signal transmission through multiple conductive lines, enhancing the overall functionality of the apparatus.

Career Highlights

Kouzou Kawahara is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics industry. His work at the company has allowed him to develop and refine his innovative ideas in substrate processing technology.

Collaborations

Throughout his career, Kouzou has collaborated with talented individuals such as Satoshi Morita and Katsunori Ichino. These collaborations have contributed to the advancement of technology in their field.

Conclusion

Kouzou Kawahara's contributions to substrate processing technology through his patents and work at Tokyo Electron Limited highlight his role as an influential inventor. His innovative designs continue to impact the industry positively.