Company Filing History:
Years Active: 2009-2010
Title: Kousei Ushijima: Innovator in Semiconductor Manufacturing
Introduction
Kousei Ushijima is a prominent inventor based in Kumamoto, Japan. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 2 patents. His work focuses on improving the reliability and efficiency of semiconductor devices.
Latest Patents
Ushijima's latest patents include a method for manufacturing a semiconductor device to form a via hole. This invention effectively prevents an increase in via resistance caused by an altered layer formed after the via hole's creation, thereby enhancing the reliability of the semiconductor device. The method involves several steps, including forming a TiN film on a semiconductor substrate, creating an interlayer insulating film, and plasma-processing the exposed portion of the TiN film to remove the altered layer.
Another notable patent is a method for manufacturing a semiconductor device that includes forming a metal interconnect on a substrate and a refractory metal layer containing titanium or tantalum. This method selectively etches the insulating interlayer to form a hole, treating the interior of the hole to remove fluorinated compounds while leaving fluorocarbons on the surface. Plasma treatment is then performed to eliminate the fluorocarbon.
Career Highlights
Kousei Ushijima is currently employed at NEC Electronics Corporation, where he continues to innovate in semiconductor technology. His work has been instrumental in advancing manufacturing processes that enhance device performance and reliability.
Collaborations
Ushijima collaborates with notable colleagues, including Kenichi Yamamoto and Masashige Moritoki. Their combined expertise contributes to the development of cutting-edge semiconductor technologies.
Conclusion
Kousei Ushijima's contributions to semiconductor manufacturing through his innovative patents and collaborations highlight his role as a key figure in the industry. His work continues to influence the reliability and efficiency of semiconductor devices, making a lasting impact on technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.