Kouichi Kazama

Title: Kouichi Kazama: Innovator in Electrostatic Technology

Introduction

Kouichi Kazama is a notable inventor based in Yamanashi-ken, Japan. He has made significant contributions to the field of electrostatic technology, holding two patents that showcase his innovative spirit and technical expertise.

Latest Patents

Kazama's latest patents include an electrostatic chuck and a method for controlling the temperature of a susceptor. The electrostatic chuck patent describes a device that incorporates a conductive film and an insulating coat on a susceptor. This design allows for the generation of an electrostatic attractive force through a feeder circuit that applies voltage to the conductive film. The second patent outlines a method for controlling the temperature of a susceptor in a plasma etching apparatus. This method involves a series of operational modes, including initialization, idle, process, and maintenance modes, to effectively manage the temperature during semiconductor processing.

Career Highlights

Throughout his career, Kazama has worked with prominent companies such as Tokyo Electron Limited and Tokyo Electron Yamanashi Limited. His experience in these organizations has allowed him to refine his skills and contribute to advancements in semiconductor technology.

Collaborations

Kazama has collaborated with notable colleagues, including Mitsuaki Komino and Kenji Ishikawa. Their teamwork has likely fostered an environment of innovation and creativity in their respective projects.

Conclusion

Kouichi Kazama's contributions to electrostatic technology and semiconductor processing highlight his role as a significant inventor in the field. His patents reflect a deep understanding of the technical challenges in the industry and a commitment to finding effective solutions.