Kou Okamura

Title: Kou Okamura: Innovator in Film Thickness Monitoring Technology

Introduction

Kou Okamura is a notable inventor based in Kanagawa, Japan. He has made significant contributions to the field of film thickness monitoring technology. His innovative work has led to the development of a unique sensor head designed for crystal oscillator type film thickness monitors.

Latest Patents

Kou Okamura holds a patent for a sensor head that features a main body containing a stepping motor. This sensor head includes a holder with multiple crystal oscillators, which is driven for rotation by the motor. Additionally, it has a mask body that covers the holder's upper surface and contains a film-forming window aligned with one of the crystal oscillators. The design also incorporates a first electrode positioned beneath the film-forming window and second electrodes that are in electrical conduction with each crystal oscillator, protruding from the holder's lower surface. This innovative design enhances the accuracy and efficiency of film thickness measurements.

Career Highlights

Kou Okamura is currently employed at Ulvac, Inc., where he continues to advance his research and development efforts. His work at Ulvac has positioned him as a key player in the field of semiconductor manufacturing and measurement technologies.

Collaborations

Throughout his career, Kou has collaborated with talented individuals such as Akihiro Maeda and Yousuke Oguma. These collaborations have fostered a creative environment that encourages innovation and the sharing of ideas.

Conclusion

Kou Okamura's contributions to film thickness monitoring technology exemplify his dedication to innovation. His patented sensor head represents a significant advancement in the field, showcasing his expertise and commitment to improving measurement techniques.