Konstantin V Loiko

Title: Inventor Konstantin V Loiko: Innovations in Integrated Circuit Technology

Introduction

Konstantin V Loiko is a prominent inventor based in Singapore, known for his significant contributions to the field of integrated circuit technology. With an impressive portfolio of four patents, he has devised innovative solutions that enhance the performance and reliability of microelectronics.

Latest Patents

Among his most recent inventions are two groundbreaking patents focused on the design of oxidation masks tailored for integrated circuits. The first patent, "Dislocation free local oxidation of silicon with suppression of narrow space field oxide thinning effect," introduces a novel oxidation mask design that significantly improves control over the field oxide isolation profile. This innovation caters specifically to the challenges of narrow field isolation spacings found in sub half-micron technology. The mask utilizes a thin silicon nitride foot, which allows for expansion of the oxide during initial oxidation stages, enabling stress relief and a smoother oxide profile. Additionally, a cantilevered portion of a thicker silicon nitride layer suppresses upward movement during oxidation's later stages, reducing shear stresses responsible for dislocation generation by up to fifty-fold, thereby enhancing surface topography and preventing narrowing effects.

The second patent, "LOCOS mask for suppression of narrow space field oxide thinning and oxide punch through effect," shares a similar foundational concept but employs a tapered silicon nitride foot. This design facilitates gradual stiffness increase during oxidation, allowing flexible initial growth followed by rigidity to inhibit the penetration of birds beak. Like the first patent, it also significantly reduces dislocation-causing shear stresses, which leads to better surface quality and mitigates issues like oxide punch through.

Career Highlights

Konstantin is employed by Chartered Semiconductor Manufacturing Ltd, a reputable corporation in the semiconductor industry. His work there reflects a deep commitment to advancing microelectronic technologies and addressing the critical challenges faced by the industry.

Collaborations

Throughout his career, Konstantin has collaborated effectively with notable coworkers, including Igor V Peidous and Tan Poh Suan. These partnerships have fostered an environment of innovation and have contributed to the advancement of their collective research and development efforts in semiconductor technologies.

Conclusion

Konstantin V Loiko stands out as a leading inventor whose patents provide vital solutions to complex challenges in integrated circuit technology. His ongoing contributions not only drive technological advancement but also reflect the innovative spirit that defines the field of microelectronics.