Kok Hiang Tang

Title: Innovator Kok Hiang Tang: Pioneering Semiconductor Technologies in Singapore

Introduction

Kok Hiang Tang is a distinguished inventor based in Singapore, renowned for his contributions to the field of semiconductor technology. With a total of three patents to his name, he has demonstrated a profound understanding of materials and fabrication techniques essential for modern electronics.

Latest Patents

Kok Hiang Tang’s latest innovations include two pivotal patents that address critical challenges in metal corrosion and metal oxide semiconductor (MOS) transistor fabrication. The first patent describes a method for eliminating metal corrosion by employing fluorosilicate glass (FSG). This process begins with a semiconductor substrate, where an overlying metal layer and oxide hard masks are provided. Through precise etching, metal lines separated by openings are formed, followed by the creation of an oxide liner. A layer of FSG is deposited and planarized to ensure optimal formation of metal plugs within the via openings, thereby enhancing reliability and performance.

The second patent presents a method to form MOS transistors that feature a common shallow trench isolation (STI) and interlevel dielectric (ILD) gap fill. This comprehensive approach involves several stages, including the deposition of a pad oxide layer and a silicon nitride layer, patterning of trenches, and the creation of dummy gate electrodes. By refining these processes, this innovative method provides improved efficiency in the manufacturing of integrated circuit devices.

Career Highlights

Kok Hiang Tang is affiliated with Chartered Semiconductor Manufacturing Ltd, a key player in the semiconductor industry. His work focuses on developing advanced methodologies that streamline semiconductor fabrication, making significant contributions to the efficiency and capability of electronic components.

Collaborations

Throughout his career, Kok Hiang Tang has collaborated with esteemed colleagues, including Kok Hin Teo and Alex See. These partnerships have fostered a productive environment, augmenting the innovative processes that define their projects.

Conclusion

Kok Hiang Tang stands out as a prominent inventor in Singapore's semiconductor landscape. His groundbreaking patents reflect his dedication to overcoming technical challenges in the field, paving the way for enhanced semiconductor applications. As he continues to develop innovative solutions, his contributions will undoubtedly shape the future of electronics and semiconductor manufacturing.