Company Filing History:
Years Active: 1987-1991
Title: Koichi Matsushita: Innovator in Photolithography and Semiconductor Technology
Introduction
Koichi Matsushita is a prominent inventor based in Chiba, Japan. He has made significant contributions to the fields of photolithography and semiconductor technology. With a total of 10 patents to his name, Matsushita has played a crucial role in advancing the capabilities of display devices and exposure apparatuses.
Latest Patents
Matsushita's latest patents include an exposure apparatus designed for photolithographically transferring patterns onto plate-like members. This apparatus is particularly useful for creating patterns corresponding to picture elements of liquid crystal display devices and their driving circuits. The innovative design allows for the surface of the plate-like member to be divided into different areas, enabling stepwise feeding relative to an optical system. This process ensures that both picture-element patterns and circuit patterns are accurately transferred, contributing to the formation of large-size display picture planes.
Another notable invention is the movable stage mechanism, which is utilized in X-ray exposure apparatuses. This device facilitates the movement of semiconductor wafers in a vacuum environment. The wafer chuck holds the wafer in a vertical plane and allows for precise vertical and horizontal movements. The design incorporates a guide mechanism, locking mechanism, and a constant-tension spring mechanism to ensure high-accuracy movement and positioning of the wafer chuck.
Career Highlights
Matsushita is currently employed at Canon Kabushiki Kaisha, a leading company in imaging and optical products. His work at Canon has allowed him to further develop his innovative ideas and contribute to the company's advancements in technology.
Collaborations
Throughout his career, Matsushita has collaborated with notable coworkers such as Hironori Yamamoto and Junji Isohata. These collaborations have fostered an environment of innovation and creativity, leading to the development of groundbreaking technologies.
Conclusion
Koichi Matsushita is a distinguished inventor whose work has significantly impacted the fields of photolithography and semiconductor technology. His innovative patents and contributions to Canon Kabushiki Kaisha highlight his dedication to advancing technology in these critical areas.