Company Filing History:
Years Active: 2008
Title: Kohta Kusaba: Innovator in Microwave-Excited Plasma Processing
Introduction
Kohta Kusaba is a notable inventor based in Yokohama, Japan. He has made significant contributions to the field of plasma processing technology. His innovative work has led to the development of a unique apparatus that enhances the efficiency of microwave-excited plasma processing.
Latest Patents
Kusaba holds a patent for a Microwave-Excited Plasma Processing Apparatus. This apparatus demonstrates a wide pressure range and a broad applicable electric power range for normal electric discharges. The design utilizes slits cut through a rectangular waveguide, allowing for a uniform formation of the electric and magnetic fields of microwaves. The apparatus is characterized by four elliptic slits arranged along the sides of a substantial square, which are integrated into the wall of the rectangular waveguide in contact with the microwave introducing window of the vacuum chamber.
Career Highlights
Kohta Kusaba is currently associated with Ulvac, Inc., where he continues to advance his research and development efforts. His work has been instrumental in improving plasma processing techniques, which are crucial in various industrial applications.
Collaborations
Kusaba has collaborated with notable colleagues, including Yoji Taguchi and Maiko Yoshida. Their combined expertise has contributed to the success of their projects and innovations in the field.
Conclusion
Kohta Kusaba's contributions to microwave-excited plasma processing technology highlight his role as an influential inventor. His patent and ongoing work at Ulvac, Inc. reflect his commitment to advancing this important area of research.