Company Filing History:
Years Active: 2022
Title: Kohei Mizota: Innovator in Plasma Processing Technology
Introduction
Kohei Mizota is a notable inventor based in Hillsboro, Oregon, known for his contributions to plasma processing technology. He has developed innovative solutions that enhance the efficiency and effectiveness of etching processes in various applications.
Latest Patents
Mizota holds a patent for a Plasma Processing Apparatus. This apparatus is designed to perform etching on a workpiece and includes several key components. It features a container, a gas supply system for introducing processing gas, a plasma source for exciting the gas, and a support for holding the workpiece. Additionally, it has an exhaust system, electrode plates on the inner wall, insulators for electrical insulation, a DC power supply for applying voltage to the electrode plates, and a controller for managing the entire process. The controller ensures that the DC voltage is applied during or after the etching process, optimizing the operation of the apparatus.
Career Highlights
Mizota is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at this organization has allowed him to contribute significantly to advancements in plasma processing technologies.
Collaborations
Mizota has collaborated with esteemed colleagues such as Shin Okamoto and Atsutoshi Inokuchi, further enhancing the innovative capabilities within his field.
Conclusion
Kohei Mizota's work in plasma processing technology exemplifies the impact of innovation in the semiconductor industry. His patent and contributions continue to influence advancements in etching processes, showcasing the importance of inventors in driving technological progress.