This inventor holds 3 USPTO granted patents and 1 EPO patent. Top assignees: Semiconductor Energy Laboratory Co., Ltd., Agc Inc., The University of Tokyo. Active years: 2010-2026.
Company Filing History:
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1 out of 1,355 
Years Active: 2010-2026
Title: Ko Inada: Innovator in Semiconductor Manufacturing
Introduction
Ko Inada is a prominent inventor based in Atsugi, Japan. He has made significant contributions to the field of semiconductor manufacturing, particularly in the development of methods for producing silicon-on-insulator (SOI) substrates. With a total of 3 patents, Inada's work has advanced the efficiency and quality of semiconductor production.
Latest Patents
Inada's latest patents focus on a method for manufacturing semiconductor wafers. This innovative approach aims to provide an SOI substrate with a single crystal semiconductor layer that has a small and uniform thickness over an insulating film. The method reduces the time required for adding hydrogen ions and decreases the overall manufacturing time per SOI substrate. A bond layer is formed over the surface of a first semiconductor wafer, while a separation layer is created below the bond layer by irradiating the wafer with hydrogen ions using an ion doping apparatus. The hydrogen ions, accelerated by high voltage, are separated into three hydrogen ions at the semiconductor wafer surface, preventing deep penetration. Consequently, hydrogen ions are added into a shallower region of the semiconductor wafer at a higher concentration compared to conventional ion implantation methods.
Career Highlights
Ko Inada is associated with Semiconductor Energy Laboratory Co., Ltd., where he continues to innovate in semiconductor technology. His work has been instrumental in enhancing the manufacturing processes of semiconductor devices, contributing to the advancement of the industry.
Collaborations
Inada has collaborated with notable figures in the field, including Shunpei Yamazaki and Akiharu Miyanaga. These partnerships have fostered a collaborative environment that promotes innovation and the sharing of ideas.
Conclusion
Ko Inada's contributions to semiconductor manufacturing exemplify the impact of innovative thinking in technology. His patents and collaborative efforts continue to shape the future of the semiconductor industry.