This inventor holds 1 USPTO granted patent. Top assignee: Mattson Thermal Products Gmbh. Active years: 2006.
Company Filing History:
Years Active: 2006
Title: Klaus Funk - Innovator in Thermal Treatment Technologies
Introduction
Klaus Funk is a notable inventor based in Ottobrunn, Germany. He has made significant contributions to the field of thermal treatment technologies, particularly in the semiconductor industry. His innovative approach has led to the development of a unique method and apparatus for thermally treating disk-shaped substrates.
Latest Patents
Klaus Funk holds a patent for a "Method and apparatus for thermally treating disk-shaped substrates." This invention focuses on a method and apparatus designed for the thermal treatment of semiconductor wafers. The technology involves a rapid heating unit that utilizes at least one first radiation source, which is strategically spaced from the substrate being heated. The process includes a heating phase followed by a cooling phase, during which the substrate is supported at a distance of 50 µm to 1 mm via ultrasonic levitation from a heating/cooling plate. This innovative method enhances the efficiency and effectiveness of thermal treatments in semiconductor manufacturing.
Career Highlights
Klaus Funk is currently associated with Mattson Thermal Products GmbH, where he continues to advance thermal treatment technologies. His work has been instrumental in improving processes that are critical to the semiconductor industry. With a focus on innovation, he has dedicated his career to developing solutions that enhance manufacturing efficiency.
Collaborations
Due to space constraints, the details of collaborations will not be included.
Conclusion
Klaus Funk's contributions to thermal treatment technologies have made a significant impact on the semiconductor industry. His innovative methods and dedication to advancing technology continue to influence the field positively.