Location History:
- Otendorf-Okrilla, DE (1998)
- Ottendorf-Okrilla, DE (1999 - 2003)
Company Filing History:
2 out of 164,219 
2 out of 30,052 
1 out of 14,738 
Years Active: 1998-2003
Title: **Klaus Dieter Penner: A Pioneer in Semiconductor Innovations**
Introduction
Klaus Dieter Penner is a notable inventor based in Ottendorf-Okrilla, Germany. With a portfolio of four patents, he has significantly contributed to the field of semiconductor technology, focusing on methods for enhancing trench capacitance and fabricating semiconductor structures. His work combines intricate design techniques with practical applications, showcasing his expertise and innovative spirit.
Latest Patents
Two of Klaus Dieter Penner's latest patents illustrate his advancements in this domain. The first patent details a **Method for Increasing the Trench Capacitance**, where a wet-chemical etching process is employed following the etching of arsenic glass. This innovation results in a more effective n+ doped substrate within deep trench capacitors, thereby widening the trench by approximately 20 nm and improving its performance selectively with respect to the underlying layers.
The second patent, titled **Method for Fabricating a Semiconductor Structure**, describes the process of applying a dielectric antireflection layer using Plasma-Enhanced Chemical Vapor Deposition (PECVD) on a hard mask layer made of doped silicon oxide. The method allows the silicon oxide layer to be patterned into a hard mask, facilitating deep trench etching and simplifying previous methodologies that relied on multiple installations. This streamlined approach enhances operational efficiency and effectiveness.
Career Highlights
Klaus Dieter Penner has had an impactful career working with leading companies in the technology sector, including **IBM** and **Siemens Aktiengesellschaft**. His experiences at these prestigious organizations provided him with a strong foundation in semiconductor research and development, allowing him to refine his skills and contribute to groundbreaking innovations in the field.
Collaborations
Throughout his career, Penner has collaborated with noted professionals, including Susan L Cohen and Emmanuel I Cooper. These partnerships have likely enriched his research endeavors and fostered a collaborative environment for innovation, demonstrating the importance of teamwork in achieving technological advancements.
Conclusion
Klaus Dieter Penner stands out as a pivotal figure in semiconductor invention. His innovative methods and collaborative spirit exemplify the essence of progress in technology. With his ongoing contributions, he continues to influence the future of semiconductor design, making significant strides in enhancing device performance and efficiency.