Kiyoshi Miura

Title: Kiyoshi Miura: Innovator in Process Detection Technology

Introduction

Kiyoshi Miura is a notable inventor based in Osaka, Japan. He has made significant contributions to the field of process detection technology. His innovative work has led to the development of a patented method that enhances the efficiency of various processes.

Latest Patents

Kiyoshi Miura holds a patent for a "Method of detecting end point of process, end point detector, computer memory product and chemical mechanical polishing apparatus." This invention provides a method for detecting an end point by measuring a physical quantity that changes according to the progress of a process. The method involves extracting first and second time series data, with the second data delayed by a predetermined time. The end point is then detected based on the correlation between these two sets of data. This approach allows for quicker detection of the end point without the need for multiple preliminary tests.

Career Highlights

Kiyoshi Miura is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has been instrumental in advancing technologies that improve manufacturing processes.

Collaborations

Throughout his career, Kiyoshi Miura has collaborated with talented individuals such as Takaya Miyano and Kazuto Hasegawa. These collaborations have fostered innovation and contributed to the success of various projects.

Conclusion

Kiyoshi Miura's contributions to process detection technology exemplify the impact of innovative thinking in the field. His patented methods continue to influence advancements in manufacturing processes, showcasing the importance of invention in driving technological progress.