Method of detecting end point of process, end point detector, computer memory product and chemical mechanical polishing apparatus

Abstract

The invention provides a method of detecting an end point, an end point detector, a computer memory product and a chemical mechanical polishing apparatus, in which a physical quantity changing in accordance with proceeding of a process is measured, first time series data and second time series data delayed by a predetermined time from the first time series data are extracted on the basis of the measured Physical quantity, and the end point of the process is detected on the basis of correlation between the first time series data and the second time series data. Thus, the end point can be detected in a shorter period of time without previously performing plural tests.