Tokyo, Japan

Kiyohiko Sato

USPTO Granted Patents = 5 

Average Co-Inventor Count = 4.9

ph-index = 1

Forward Citations = 3(Granted Patents)


Company Filing History:


Years Active: 2021-2024

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5 patents (USPTO):

Title: The Innovative Contributions of Kiyohiko Sato

Introduction

Kiyohiko Sato is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of five patents. His work focuses on advanced manufacturing methods and plasma processing techniques that enhance the efficiency and performance of semiconductor devices.

Latest Patents

One of Sato's latest patents is a manufacturing method for a three-dimensional semiconductor device. This innovative process involves creating a three-dimensional structure with stacked channels, allowing for improved functionality without compromising the space between different threshold voltage FETs. The method includes several steps, such as anisotropic etching and the deposition of protective films, to ensure precision in the manufacturing process. Another notable patent is related to a plasma processing apparatus and method, which aims to improve yield by optimizing the processing gas supply and exhaust system. This invention enhances the efficiency of wafer etching and subsequent processing steps.

Career Highlights

Kiyohiko Sato has built a successful career at Hitachi High-Tech Corporation, where he has been instrumental in developing cutting-edge technologies. His expertise in semiconductor manufacturing has positioned him as a key figure in the industry. Sato's innovative approaches have not only advanced the capabilities of semiconductor devices but have also contributed to the overall progress of technology in this field.

Collaborations

Throughout his career, Sato has collaborated with talented individuals such as Yu Zhao and Katsuya Miura. These partnerships have fostered a creative environment that encourages the exchange of ideas and the development of groundbreaking technologies.

Conclusion

Kiyohiko Sato's contributions to semiconductor technology through his patents and innovative methods have made a lasting impact on the industry. His work continues to inspire advancements in manufacturing processes and plasma technology, solidifying his reputation as a leading inventor in the field.

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