This inventor holds 1 USPTO granted patent and 1 EPO patent. Top assignee: Ebara Corporation. Active years: 2012.
Company Filing History:
Years Active: 2012
Title: Kimihide Nagata: Innovator in Polishing Technology
Introduction
Kimihide Nagata is a prominent inventor based in Tokyo, Japan. He is known for his contributions to the field of polishing technology, particularly in the semiconductor industry. His innovative approach has led to the development of advanced polishing apparatuses that enhance the quality of semiconductor wafers.
Latest Patents
Nagata holds a patent for a polishing apparatus designed to achieve a flat mirror finish on substrates such as semiconductor wafers. The apparatus features a polishing table with a polishing surface, a top ring that holds and presses the substrate, and a top ring shaft that allows for vertical adjustments. Additionally, it includes an elongation detecting device that monitors the top ring shaft's elongation, ensuring precise control during the polishing process. This technology significantly improves the efficiency and effectiveness of semiconductor wafer polishing.
Career Highlights
Throughout his career, Kimihide Nagata has made significant strides in the field of polishing technology. He is currently associated with Ebara Corporation, where he continues to innovate and develop new solutions for the semiconductor industry. His work has been instrumental in advancing the capabilities of polishing apparatuses, making them more reliable and efficient.
Collaborations
Nagata has collaborated with notable colleagues, including Osamu Nabeya and Tetsuji Togawa. These partnerships have fostered a creative environment that encourages the exchange of ideas and the development of cutting-edge technologies.
Conclusion
Kimihide Nagata's contributions to polishing technology have made a lasting impact on the semiconductor industry. His innovative patent and collaborative efforts with esteemed colleagues highlight his dedication to advancing this critical field.