Seongnam-shi, South Korea

Ki-soo Shin


Average Co-Inventor Count = 3.6

ph-index = 1


Location History:

  • Sungnam-shi, KR (2004)
  • Seongnam-shi, KR (2006 - 2007)

Company Filing History:


Years Active: 2004-2007

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4 patents (USPTO):Explore Patents

Title: Innovations of Ki-soo Shin in Semiconductor Technology

Introduction

Ki-soo Shin is a prominent inventor based in Seongnam-shi, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. His work focuses on enhancing the efficiency and effectiveness of semiconductor devices through innovative methods.

Latest Patents

One of Ki-soo Shin's latest patents is a method for forming patterns in a semiconductor device. This method increases the contact area between a photoresist and an anti-reflective film by performing an etching process on the anti-reflective film. This process helps to form fine irregularities, thereby preventing the collapse of a photoresist pattern. The method includes several steps: forming an organic anti-reflective film, creating fine irregularities through etching, and finally forming a photoresist pattern by coating, exposing, and developing the photoresist.

Another notable patent involves an organic anti-reflective coating polymer. This polymer is designed for ultra-fine pattern formation processes in photolithography techniques using ArF light sources. It protects the photoresist from atmospheric amines, minimizing post-exposure delay effects while enhancing notching status and reducing reflection rates.

Career Highlights

Ki-soo Shin is currently employed at Hynix Semiconductor Inc., where he continues to innovate in semiconductor technology. His work has been instrumental in advancing the capabilities of semiconductor devices, making them more efficient and reliable.

Collaborations

Throughout his career, Ki-soo Shin has collaborated with notable colleagues, including Jae-chang Jung and Sung-koo Lee. These collaborations have contributed to the development of cutting-edge technologies in the semiconductor industry.

Conclusion

Ki-soo Shin's contributions to semiconductor technology through his innovative patents and collaborations highlight his importance in the field. His work continues to influence the development of advanced semiconductor devices, ensuring their efficiency and effectiveness in various applications.

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