This inventor holds 17 USPTO granted patents, primarily in Anti-Reflective Coatings. Top assignees: Hyundai Electronics Industries Co. Ltd., Hynix Semiconductor Inc.. Active years: 2001-2004.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Yicheon-shi, KR (2002)
- Gyunggi-do, KR (2001 - 2004)
Company Filing History:
13 out of 2,340 
4 out of 6,228 
Years Active: 2001-2004
Areas of Expertise:
Title: Ki-Ho Baik: Innovator in Anti-Reflective Coating Technologies
Introduction
Ki-Ho Baik is a prominent inventor based in Gyunggi-do, South Korea. He has made significant contributions to the field of semiconductor technology, particularly in the development of organic polymers for anti-reflective coatings. With a total of 17 patents to his name, Baik's work has had a substantial impact on the manufacturing processes of semiconductor devices.
Latest Patents
One of Baik's latest patents is focused on an organic polymer designed for use as an anti-reflective coating (ARC). This invention provides a polymer that can be utilized in submicrolithographic processes, particularly with KrF (248 nm) or ArF (193 nm) lasers. The polymer includes a chromophore that absorbs light at specific wavelengths, significantly reducing back reflection and preventing issues related to critical dimension (CD) alteration caused by diffracted and reflected light. This innovation is crucial for producing stable ultrafine patterns suitable for various DRAM semiconductor devices, including 64M, 256M, 1G, 4G, and 16G. Additionally, Baik's work on an organic anti-reflective coating polymer and its preparation method further enhances production yields by eliminating standing waves and controlling optical properties.
Career Highlights
Throughout his career, Ki-Ho Baik has worked with notable companies in the semiconductor industry, including Hyundai Electronics Industries Co., Ltd. and Hynix Semiconductor Inc. His expertise in polymer chemistry and semiconductor manufacturing has positioned him as a key figure in advancing anti-reflective coating technologies.
Collaborations
Baik has collaborated with talented individuals in his field, including Min-Ho Jung and Sung-Eun Hong. These partnerships have contributed to the successful development of innovative solutions in semiconductor technology.
Conclusion
Ki-Ho Baik's contributions to the field of anti-reflective coatings and semiconductor manufacturing are noteworthy. His innovative patents and collaborations have significantly advanced the technology, improving production yields and enabling the creation of more efficient semiconductor devices.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile