Khurshid Ahmed

Title: Innovations of Khurshid Ahmed in Laser Technology

Introduction

Khurshid Ahmed is a prominent inventor based in San Diego, CA, known for his significant contributions to laser technology. He holds three patents that showcase his expertise in developing advanced laser systems for various applications. His work has been instrumental in enhancing the efficiency and precision of laser technologies.

Latest Patents

One of Khurshid Ahmed's latest patents is the "Gas discharge laser light source beam delivery unit." This invention provides a method for delivering a laser beam from a gas discharge laser to a working apparatus. The design includes a beam delivery enclosure, a purge mechanism, and an in-situ beam parameter monitor. Additionally, it features a retractable beam redirecting optic and a beam analysis mechanism. The patent also describes a method of contamination control for the beam delivery unit, ensuring optimal performance.

Another notable patent is related to "Laser spectral engineering for lithographic process." This integrated circuit lithography technique focuses on bandwidth control of an electric discharge laser. By utilizing a computer model, the desired laser spectrum is determined to achieve improved pattern resolution in photo resist film. The invention includes a fast-responding tuning mechanism and line narrowing equipment, enhancing the precision of lithographic processes.

Career Highlights

Khurshid Ahmed has made significant strides in his career, particularly through his work at Cymer, Inc. His innovative approaches to laser technology have positioned him as a leader in the field. His patents reflect a deep understanding of the complexities involved in laser systems and their applications.

Collaborations

Khurshid has collaborated with notable colleagues, including Palash P Das and Armen Kroyan. These partnerships have contributed to the advancement of laser technology and the successful development of innovative solutions.

Conclusion

Khurshid Ahmed's contributions to laser technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence advancements in laser systems, showcasing the importance of innovation in technology.