Milpitas, CA, United States of America

Khiem D Vo


Average Co-Inventor Count = 7.0

ph-index = 2

Forward Citations = 26(Granted Patents)


Company Filing History:


Years Active: 2004-2006

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2 patents (USPTO):Explore Patents

Title: Khiem D Vo: Innovator in Optical Inspection Technology

Introduction

Khiem D Vo is a notable inventor based in Milpitas, California, recognized for his contributions to the field of optical inspection technology. With a total of two patents, Vo has developed innovative methods to enhance the detection of anomalies in semiconductor samples, addressing critical challenges in quality assurance and manufacturing processes.

Latest Patents

One of Khiem D Vo's latest patents is focused on apparatus and methods for optically inspecting a sample for anomalies. This invention discloses methods for detecting a wide dynamic range of intensity values from various beams, such as scattered light or reflected light, emanating from samples like semiconductor wafers. The inspection system enables the analysis of detected output signals, facilitating the identification of potential defects by comparing intensity values from target and reference dies. Vo's system incorporates a beam generator and a sophisticated detector that includes a sensor and a non-linear component to produce a digitized detected signal, thereby streamlining the defect detection process.

Career Highlights

Khiem D Vo is associated with KLA-Tencor Technologies Corporation, where he has applied his expertise in developing optical inspection systems. His work is pivotal in advancing semiconductor manufacturing, ensuring that high-quality standards are maintained throughout the production process.

Collaborations

In his career, Vo has collaborated with esteemed colleagues, including Ralph C Wolf and Eva L Benitez. Together, they have contributed to innovations that enhance the efficacy of optical inspection technologies, fostering advancements in the semiconductor industry.

Conclusion

Khiem D Vo's inventive contributions have left a significant mark on the realm of optical inspection technology. His commitment to innovation and collaboration with talented professionals underscores the importance of thorough quality assurance in semiconductor manufacturing. As technologies continue to evolve, Vo’s work serves as a beacon for future advancements in this critical field.

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